Siウェハ透過/反射測定システム

フーリエ変換赤外分光光度計

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　　MAP300　　　　　　　　　MappIR

PIKE社製の半導体ウェハ用自動分析装置（MAP300）を用いて、12インチウェハの透過/反射測定を自動化するシステムです。
よりサイズの小さいウェハ（8インチ以下）を自動測定するための装置（MappIR）もご用意しています。

 

注）IRSpiritシリーズには対応していません。

対象試料

Siウェハ

FTIRカスタム製品の
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