SPL/MMI/SPI Replacement of Split Filter
Preparation¶
First, set the instrument to a state in which it can be serviced (Maintenance Mode).
- Enter maintenance mode using the workstation.
- Enter maintenance mode using the instrument monitor.
- Enter maintenance mode using the maintenance button on the instrument.
Perform "① Replacement of the split filter" and "② Replacement of the SPLIT/PURGE trap" simultaneously.
"② Replacement of the SPLIT/PURGE trap" applies only when using MMI.
① Replacement of the split filter
② Replacement of the SPLIT/PURGE trap (MMI Only)
Required devices¶
No. |
Parts name |
Category |
Required number |
Note |
|---|---|---|---|---|
① |
Split Filter |
1 |
||
② |
SPLIT/PURGE Trap |
1 |
||
③ |
AL Gasket |
1 |
||
④ |
10×12 Spanner |
1 |
Procedures¶
Step 1¶
Open the AFC/APC cover (★1).
Step 2¶
Turn the filter nut (★2) counterclockwise to remove the old split filter (①).
Step 3¶
Check that there are 2 pcs of O-rings on the new split filter.
Step 4¶
Install a filter nut (★2) on the new split filter (①).
Step 5¶
Place the split filter on the holding table, draw the center axis of the split filter through the hole of the filter fixing block, and insert it toward the back.
Step 6¶
Turn the filter nut (★2) clockwise to fix the split filter.
Step 7¶
Open the INJ/DET cover (★3).
Step 8¶
Loosen and remove the joints at both ends of the SPLIT/PURGE trap.
Step 9¶
Install the new trap by turning it clockwise and tighten it with a wrench. Be sure to insert 2 or 3 AL Gasket (③) into the G-type joint.
Step 10¶
Close the INJ/DET cover and the AFC/APC cover.
Step 11¶
Follow one of the procedures below to exit maintenance mode.