Table of Contents

Diagnosis of valve failure

For AFC:¶

Close the main valve of the cylinder for safety.
Open the column connection of the injection port and check that the column inlet pressure on the monitor decreases. (If the pressure value on the monitor does not decrease, perform offset calibration.)
When the pressure value on the monitor decreases, connect the column to the column connection again (or seal it) and check whether the column inlet pressure increases when supplying the gas to the AFC.
When the column inlet pressure increases, the valve or board may have failed.

For DETAPC (ECD/BID):¶

The setting value for the bypass unit of ECD or BID may be misaligned significantly. Close the manual valve of the bypass unit of ECD or BID totally.
Then, check whether the APC flow on the monitor decreases.
When the APC flow does not decrease, the valve or board may have failed.

For DETAPC (other than ECD/BID):¶

Close the main valve of the cylinder for safety.
Check whether the APC flow on the monitor decreases.
When the APC flow does not decrease, the valve or board may have failed.

For AUX-APC:¶

Close the main valve of the cylinder for safety.
Ensure that the AUX-APC outlet opens to the atmosphere.
When the pressure value on the monitor does not decrease while the APC outlet opens to the atmosphere, the valve or board may have failed.