SCD furnace oxygen control irregularity [Error Code:6171]
Cause¶
The flow of the flow controller to control oxygen gas for the SCD furnace is unstable.
Solution¶
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Check that the oxygen gas supply pressure is within the range below.
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Check that the gas supply pressure is stable.
If the error appears repeatedly even after checking the above, the flow controller may have failed.
Turn off the main power of the instrument, stop gas supply, and contact your Shimadzu sales/service representative.